@inproceedings{TUW-103558, author = {Pyka, Wolfgang and Selberherr, Siegfried and Sukharev, V.}, title = {{I}ncorporation of {E}quipment {S}imulation into {I}ntegrated {F}eature {S}cale {P}rofile {E}volution}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {2000}, pages = {180--183}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2001/CP2000_Pyka_1.pdf}, isbn = {2-86332-248-6}, note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {C}ork; 2000-09-11 -- 2000-09-13} }