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@phdthesis{TUW-103571,
    author = {H{\"o}ssinger, Andreas},
    title = {{S}imulation of {I}on {I}mplantation for {U}{L}{S}{I} {T}echnology},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2000},
    url = {http://www.iue.tuwien.ac.at/phd/hoessinger}
}