@inproceedings{TUW-103651, author = {Grasser, Tibor and Selberherr, Siegfried}, title = {{T}echnology {C}{A}{D}: {D}evice {S}imulation and {C}haracterization}, booktitle = {{S}ixth {I}nternational {W}orkshop on the {F}abrication, {C}haracterization, and {M}odeling of {U}ltra {S}hallow {D}oping {P}rofiles in {S}emiconductors}, year = {2001}, pages = {4--11}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2001/CP2001_Grasser_5.pdf}, note = {invited; talk: {U}ltra {S}hallow {J}unctions {C}onference, {N}apa; 2001-04-22 -- 2001-04-26} }