@article{TUW-104109, author = {Vuong, H.-H. and Xie, Y.-H. and Frei, M. R. and Hobler, Gerhard and Pelaz, L. and Rafferty, C.S.}, title = {{U}se of transient enhanced diffusion to tailor boron out-diffusion}, journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices}, year = {2000}, volume = {47}, pages = {1401--1405} }