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@techreport{TUW-104321,
    author = {Boxleitner, Winfried and Hobler, Gerhard},
    title = {{H}igh {Q}uality {S}ample {O}peration for {N}anometric {A}nalysis and {T}esting {E}quipments},
    institution = {{E}362 - {I}nstitute of {S}olid {S}tate {E}lectronics; {V}ienna {U}niversity of {T}echnology},
    year = {2000}
}