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@inproceedings{TUW-104730,
    author = {Palankovski, Vassil and Belova, N. and Grasser, Tibor and Puchner, Helmut and Aronowitz, Sheldon and Selberherr, Siegfried},
    title = {{A} {M}ethodology for {D}eep {S}ub-{Q}uartermicron {C}{M}{O}{S} {T}echnology {C}haracterization},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2001},
    pages = {428--431},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/CP2001_Palankovski_1.pdf},
    isbn = {3-211-83708-6},
    doi = {10.1007/978-3-7091-6244-6{\_}99},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {A}thens, {G}reece; 2001-09-05 -- 2001-09-07}
}