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@inproceedings{TUW-104731,
    author = {H{\"o}ssinger, Andreas and Binder, Thomas and Pyka, Wolfgang and Selberherr, Siegfried},
    title = {{A}dvanced {H}ybrid {C}ellular {B}ased {A}pproach for {T}hree-{D}imensional {E}tching and {D}eposition {S}imulation},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2001},
    pages = {424--427},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/CP2001_Hoessinger_1.pdf},
    isbn = {3-211-83708-6},
    doi = {10.1007/978-3-7091-6244-6{\_}98},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {A}thens, {G}reece; 2001-09-05 -- 2001-09-07}
}