@inproceedings{TUW-104739, author = {Pyka, Wolfgang and Heitzinger, Clemens and Tamaoki, N. and Takase, T. and Ohmine, T. and Selberherr, Siegfried}, title = {{M}onitoring {A}rsenic {I}n-{S}itu {D}oping with {A}dvanced {M}odels for {P}oly-{S}ilicon {C}{V}{D}}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})}, year = {2001}, pages = {124--127}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/CP2001_Pyka_1.pdf}, isbn = {3-211-83708-6}, doi = {10.1007/978-3-7091-6244-6{\_}27}, note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {A}thens, {G}reece; 2001-09-05 -- 2001-09-07} }