@article{TUW-104762, author = {Palmetshofer, L. and Gritsch, Martin and Hobler, Gerhard}, title = {{R}ange of ion-implanted rare earth elements in {S}i and {S}i{O}2}, journal = {{M}aterials {S}cience and {E}ngineering {B}}, year = {2001}, volume = {B 81}, pages = {83} }