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@article{TUW-104762,
    author = {Palmetshofer, L. and Gritsch, Martin and Hobler, Gerhard},
    title = {{R}ange of ion-implanted rare earth elements in {S}i and {S}i{O}2},
    journal = {{M}aterials {S}cience and {E}ngineering {B}},
    year = {2001},
    volume = {B 81},
    pages = {83}
}