@article{TUW-104763, author = {Boxleitner, Winfried and Hobler, Gerhard and Kl{\"u}ppel, V. and Cerva, H.}, title = {{S}imulation of topography evolution and damage formation in {T}{E}{M} sample preparation using focused ion beams}, journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}}, year = {2001}, volume = {175-177}, pages = {102} }