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@article{TUW-104763,
    author = {Boxleitner, Winfried and Hobler, Gerhard and Kl{\"u}ppel, V. and Cerva, H.},
    title = {{S}imulation of topography evolution and damage formation in {T}{E}{M} sample preparation using focused ion beams},
    journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}},
    year = {2001},
    volume = {175-177},
    pages = {102}
}