@article{TUW-104764, author = {Boxleitner, Winfried and Hobler, Gerhard}, title = {{F}{I}{B}{S}{I}{M} -- {D}ynamic {M}onte {C}arlo simulation of compositional and topography changes caused by focused ion beam milling}, journal = {{N}uclear {I}nstruments {\&} {M}ethods {B}}, year = {2001}, volume = {180}, pages = {125} }