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@inproceedings{TUW-104969,
    author = {Heitzinger, Clemens and Selberherr, Siegfried},
    title = {{O}n the {T}opography {S}imulation of {M}emory {C}ell {T}renches for {S}emiconductor {M}anufacturing {D}eposition {P}rocesses {U}sing the {L}evel {S}et {M}ethod},
    booktitle = {16th {E}uropean {S}imulation {M}ulticonference},
    year = {2002},
    pages = {653--660},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/CP2002_Heitzinger_2.pdf},
    isbn = {90-77039-07-4},
    note = {talk: {E}uropean {S}imulation {M}ulticonference ({E}{S}{M}), {D}armstadt; 2002-06-03 -- 2002-06-05}
}