@inproceedings{TUW-104969, author = {Heitzinger, Clemens and Selberherr, Siegfried}, title = {{O}n the {T}opography {S}imulation of {M}emory {C}ell {T}renches for {S}emiconductor {M}anufacturing {D}eposition {P}rocesses {U}sing the {L}evel {S}et {M}ethod}, booktitle = {16th {E}uropean {S}imulation {M}ulticonference}, year = {2002}, pages = {653--660}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/CP2002_Heitzinger_2.pdf}, isbn = {90-77039-07-4}, note = {talk: {E}uropean {S}imulation {M}ulticonference ({E}{S}{M}), {D}armstadt; 2002-06-03 -- 2002-06-05} }