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@inproceedings{TUW-104970,
    author = {Heitzinger, Clemens and Selberherr, Siegfried},
    title = {{A} {C}alibrated {M}odel for {S}ilicon {S}elf-{I}nterstitial {C}luster {F}ormation and {D}issolution},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L})},
    year = {2002},
    pages = {431--434},
    address = {2},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/CP2002_Heitzinger_1.pdf},
    doi = {10.1109/MIEL.2002.1003291},
    note = {talk: {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {N}is; 2002-05-12 -- 2002-05-15}
}