@inproceedings{TUW-104970, author = {Heitzinger, Clemens and Selberherr, Siegfried}, title = {{A} {C}alibrated {M}odel for {S}ilicon {S}elf-{I}nterstitial {C}luster {F}ormation and {D}issolution}, booktitle = {{P}roceedings of the {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L})}, year = {2002}, pages = {431--434}, address = {2}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/CP2002_Heitzinger_1.pdf}, doi = {10.1109/MIEL.2002.1003291}, note = {talk: {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {N}is; 2002-05-12 -- 2002-05-15} }