@article{TUW-104987, author = {Gamiz, Francisco and Roldan, Juan B. and Kosina, Hans and Grasser, Tibor}, title = {{Improving Strained-Si on Si{$_{1-x}$}Ge{$_{x}$} Deep Submicron MOSFETs Performance by Means of a Stepped Doping Profile}}, journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices}, year = {2001}, volume = {48}, number = {9}, pages = {1878--1884}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2002/JB2002_Gamiz_1.pdf} }