@inproceedings{TUW-104996, author = {Selberherr, Siegfried and Langer, Erasmus}, title = {{T}hree {D}imensional {P}rocess and {D}evice {M}odeling}, booktitle = {{P}roceedings of the {Y}ugoslav {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L})}, year = {1989}, pages = {383--407}, address = {1}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1989/CP1989_Selberherr_3.pdf}, isbn = {0-948577-33-9}, note = {invited; talk: {Y}ugoslav {I}nternational {C}onference on {M}icroelectronics ({M}{I}{E}{L}), {N}is; 1989-05-09 -- 1989-05-11} }