@article{TUW-105012, author = {Selberherr, Siegfried and Langer, Erasmus}, title = {{T}hree {D}imensional {P}rocess and {D}evice {M}odeling}, journal = {{M}icroelectronics {J}ournal}, year = {1989}, volume = {20}, number = {1-2}, pages = {113--127}, url = {http://www.iue.tuwien.ac.at/pdf/JB1989_Selberherr_1.pdf}, doi = {10.1016/0026-2692(89)90126-2}, note = {invited} }