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@phdthesis{TUW-105016,
    author = {Hobler, Gerhard},
    title = {{S}imulation der {I}onenimplantation in ein-, zwei- und dreidimensionalen {S}trukturen},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1988}
}