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@inproceedings{TUW-105046,
    author = {Heitzinger, Clemens and Fugger, J. and H{\"a}berlen, O. and Selberherr, Siegfried},
    title = {{S}imulation and {I}nverse {M}odeling of {T}{E}{O}{S} {D}eposition {P}rocesses {U}sing a {F}ast {L}evel {S}et {M}ethod},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2002},
    pages = {191--194},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2002_Heitzinger_3.pdf},
    isbn = {4-89114-027-5},
    doi = {10.1109/SISPAD.2002.1034549},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {K}obe, {J}apan; 2002-09-04 -- 2002-09-06}
}