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@unpublished{TUW-105465,
    author = {Wanzenb{\"o}ck, Heinz D. and Hobler, Gerhard and Langfischer, Helmut and Harasek, S. and Brezna, Wolfgang and Smoliner, J{\"u}rgen and Bertagnolli, Emmerich},
    title = {{C}haracterization of {D}oping and intermixing effects of focused ion beam processing},
    year = {2002},
    note = {talk: {I}{B}{M}{M} 2002, {K}obe, {J}apan; 2002-09-01 -- 2002-09-06}
}