@unpublished{TUW-105481, author = {Hobler, Gerhard}, title = {{S}tatus and open problems in silicon implant damage modeling}, year = {2002}, note = {talk: 3rd {I}nt. {M}eeting {C}hallenges in {P}redictive {P}rocess {S}imulation, {P}rague, {C}zech {R}epublic; 2002-10-13 -- 2002-10-17} }