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@unpublished{TUW-105481,
    author = {Hobler, Gerhard},
    title = {{S}tatus and open problems in silicon implant damage modeling},
    year = {2002},
    note = {talk: 3rd {I}nt. {M}eeting {C}hallenges in {P}redictive {P}rocess {S}imulation, {P}rague, {C}zech {R}epublic; 2002-10-13 -- 2002-10-17}
}