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@inproceedings{TUW-105594,
    author = {Heitzinger, Clemens and Sheikholeslami, Alireza and Selberherr, Siegfried},
    title = {{P}redictive {S}imulation of {E}tching and {D}eposition {P}rocesses {U}sing the {L}evel {S}et {M}ethod},
    booktitle = {{C}hi{P}{P}{S}-2002 {C}hallenges in {P}redictive {P}rocess {S}imulation},
    year = {2002},
    pages = {65--66},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2002_Heitzinger_5.pdf},
    note = {poster presentation: {I}nternational {W}orkshop on {C}hallenges in {P}redictive {P}rocess {S}imulation ({C}hi{P}{P}{S}), {P}rague; 2002-10-13 -- 2002-10-17}
}