[Back]

@inproceedings{TUW-105595,
    author = {Heitzinger, Clemens and Selberherr, Siegfried and Fugger, J. and H{\"a}berlen, O.},
    title = {{O}n {I}ncreasing the {A}ccuracy of {S}imulations of {D}eposition and {E}tching {P}rocesses {U}sing {R}adiosity and the {L}evel {S}et {M}ethod},
    booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})},
    year = {2002},
    pages = {347--350},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2002_Heitzinger_4.pdf},
    isbn = {88-900847-8-2},
    note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {F}lorence; 2002-09-24 -- 2002-09-26}
}