@inproceedings{TUW-105636, author = {Park, Jong Mun and Klima, Robert and Selberherr, Siegfried}, title = {{L}ateral {T}rench {G}ate {S}uper-{J}unction {S}{O}{I}-{L}{D}{M}{O}{S}{F}{E}{T}s with {L}ow {O}n-{R}esistance}, booktitle = {{P}roceedings of the {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C})}, year = {2002}, pages = {283--286}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2002_Park_2.pdf}, isbn = {88-900847-8-2}, note = {talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {F}lorence; 2002-09-24 -- 2002-09-26} }