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@article{TUW-105837,
    author = {Lugstein, Alois and Basnar, B. and Hobler, Gerhard and Bertagnolli, Emmerich},
    title = {{C}urrent density profile extraction of focused ion beams based on atomic force microscopy contour profiling of nanodots},
    journal = {{J}ournal of {A}pplied {P}hysics},
    year = {2002},
    volume = {92},
    number = {7},
    pages = {4037--4042}
}