@article{TUW-105837, author = {Lugstein, Alois and Basnar, B. and Hobler, Gerhard and Bertagnolli, Emmerich}, title = {{C}urrent density profile extraction of focused ion beams based on atomic force microscopy contour profiling of nanodots}, journal = {{J}ournal of {A}pplied {P}hysics}, year = {2002}, volume = {92}, number = {7}, pages = {4037--4042} }