[Back]

@phdthesis{TUW-106007,
    author = {Wimmer, Karl},
    title = {{T}wo-{D}imensional {N}onplanar {P}rocess {S}imulation},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1993},
    url = {http://www.iue.tuwien.ac.at/phd/wimmer}
}