@article{TUW-106017, author = {Hobler, Gerhard and Selberherr, Siegfried}, title = {{T}wo-{D}imensional {M}odeling of {I}on {I}mplantation {I}nduced {P}oint {D}efects}, journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems}, year = {1988}, volume = {7}, number = {2}, pages = {174--180}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1989/JB1988_Hobler_1.pdf}, doi = {10.1109/43.3147} }