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@article{TUW-106017,
    author = {Hobler, Gerhard and Selberherr, Siegfried},
    title = {{T}wo-{D}imensional {M}odeling of {I}on {I}mplantation {I}nduced {P}oint {D}efects},
    journal = {{I}{E}{E}{E} {T}ransactions on {C}omputer-{A}ided {D}esign of {I}ntegrated {C}ircuits and {S}ystems},
    year = {1988},
    volume = {7},
    number = {2},
    pages = {174--180},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1989/JB1988_Hobler_1.pdf},
    doi = {10.1109/43.3147}
}