@inproceedings{TUW-106021, author = {Halama, Stefan and Selberherr, Siegfried}, title = {{F}uture {A}spects of {P}rocess and {D}evice {S}imulation}, booktitle = {{A}bstracts {S}{E}{T} 92 {C}onference}, year = {1992}, pages = {83--85}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1992/CP1992_Halama_2.pdf}, isbn = {83-01-11293-x}, note = {invited; talk: {S}emiconductor {E}ngineering and {T}echnology {S}ymposium ({S}{E}{T}), {W}arschau; 1992-10-12 -- 1992-10-14} }