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@inproceedings{TUW-106040,
    author = {Stippel, Hannes and Hobler, Gerhard and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {I}on {I}mplantation},
    booktitle = {{P}roceedings {S}olid {S}tate and {I}ntegrated {C}ircuit {T}echnology 92 {C}onference},
    year = {1992},
    pages = {703--705},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1992/CP1992_Stippel_2.pdf},
    note = {talk: {I}nternational {C}onference on {S}olid {S}tate and {I}ntegrated {C}ircuit {T}echnology ({I}{C}{S}{I}{C}{T}), {P}eking; 1992-10-18 -- 1992-10-24}
}