@inproceedings{TUW-106040, author = {Stippel, Hannes and Hobler, Gerhard and Selberherr, Siegfried}, title = {{T}hree-{D}imensional {S}imulation of {I}on {I}mplantation}, booktitle = {{P}roceedings {S}olid {S}tate and {I}ntegrated {C}ircuit {T}echnology 92 {C}onference}, year = {1992}, pages = {703--705}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1992/CP1992_Stippel_2.pdf}, note = {talk: {I}nternational {C}onference on {S}olid {S}tate and {I}ntegrated {C}ircuit {T}echnology ({I}{C}{S}{I}{C}{T}), {P}eking; 1992-10-18 -- 1992-10-24} }