@inproceedings{TUW-106066, author = {Bauer, Alexander and Noll, H. and Pimingstorfer, Hubert}, title = {{O}ptimizing {R}eliability of a 10{V} {C}{M}{O}{S} {P}rocess {U}sing {P}rocess and {D}evice {S}imulation}, booktitle = {{P}roceedings {I}{A}{S}{T}{E}{D} {I}nternational {C}onference on {M}odelling and {S}imulation}, year = {1993}, note = {talk: {I}nternational {C}onference on {M}odelling and {S}imulation, {P}ittsburgh, {U}{S}{A}; 1993-05-10 -- 1993-05-12} }