@inproceedings{TUW-106067, author = {Pichler, Christoph and Selberherr, Siegfried}, title = {{R}apid {S}emiconductor {P}rocess {D}esign with the {V}{I}{S}{T}{A} {F}ramework: {I}ntegration of {S}imulation {T}ools}, booktitle = {{P}roceedings {I}{A}{S}{T}{E}{D} {I}nternational {C}onference on {M}odelling and {S}imulation}, year = {1993}, pages = {147--150}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1993/CP1993_Pichler_1.pdf}, note = {talk: {I}nternational {C}onference on {M}odelling and {S}imulation, {P}ittsburgh; 1993-05-10 -- 1993-05-12} }