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@inproceedings{TUW-106068,
    author = {Strasser, Ernst and Wimmer, Karl and Selberherr, Siegfried},
    title = {{A} {N}ew {M}ethod for {S}imulation of {E}tching and {D}eposition {P}rocesses},
    booktitle = {{P}roceedings {V}{P}{A}{D} {W}orkshop},
    year = {1993},
    pages = {54--55},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1993/CP1993_Strasser_1.pdf},
    isbn = {0-7803-1338-0},
    note = {talk: {V}{L}{S}{I} {P}rocess and {D}evice {M}odeling {W}orkshop ({V}{P}{A}{D}), {N}ara; 1993-05-14 -- 1993-05-15}
}