@inproceedings{TUW-106070, author = {Stippel, Hannes and Selberherr, Siegfried}, title = {{T}hree {D}imensional {M}onte {C}arlo {S}imulation of {I}on {I}mplantation with {O}ctree {B}ased {P}oint {L}ocation}, booktitle = {{P}roceedings {V}{P}{A}{D} {W}orkshop}, year = {1993}, pages = {122--123}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1993/CP1993_Stippel_1.pdf}, isbn = {0-7803-1338-0}, note = {poster presentation: {V}{L}{S}{I} {P}rocess and {D}evice {M}odeling {W}orkshop ({V}{P}{A}{D}), {N}ara; 1993-05-14 -- 1993-05-15} }