@inproceedings{TUW-106071, author = {Bauer, Robert and Stiftinger, Martin and Selberherr, Siegfried}, title = {{C}apacitance {C}alculation of {V}{L}{S}{I} {M}ultilevel {W}iring {S}tructures}, booktitle = {{P}roceedings {V}{P}{A}{D} {W}orkshop}, year = {1993}, pages = {142--143}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1993/CP1993_Bauer_1.pdf}, isbn = {0-7803-1338-0}, note = {poster presentation: {V}{L}{S}{I} {P}rocess and {D}evice {M}odeling {W}orkshop ({V}{P}{A}{D}), {N}ara; 1993-05-14 -- 1993-05-15} }