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@phdthesis{TUW-106078,
    author = {Stippel, Hannes},
    title = {{S}imulation der {I}onen-{I}mplantation},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1993},
    url = {http://www.iue.tuwien.ac.at/phd/stippel}
}