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@article{TUW-106084,
    author = {Halama, Stefan and Selberherr, Siegfried},
    title = {{F}uture {A}spects of {P}rocess and {D}evice {S}imulation},
    journal = {{E}lectron {T}echnology},
    year = {1993},
    volume = {26},
    pages = {49--57},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1993/JB1993_Halama_1.pdf},
    note = {invited}
}