@article{TUW-106090, author = {Stippel, Hannes and Selberherr, Siegfried}, title = {{M}onte {C}arlo {S}imulation of {I}on {I}mplantation for {T}hree-{D}imensional {S}tructures {U}sing an {O}ctree}, journal = {{I}{E}{I}{C}{E} {T}ransactions on {E}lectronics}, year = {1994}, volume = {E77-C}, number = {2}, pages = {118--123}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1994/JB1994_Stippel_1.pdf} }