@inproceedings{TUW-106104, author = {Strasser, Ernst and Selberherr, Siegfried}, title = {{A} {G}eneral {S}imulation {M}ethod for {E}tching and {D}eposition {P}rocesses}, booktitle = {{P}roceedings {S}{I}{S}{D}{E}{P} 93 {C}onference}, year = {1993}, pages = {357--360}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1994/CP1993_Strasser_1.pdf}, isbn = {3-211-82504-5}, doi = {10.1007/978-3-7091-6657-4{\_}88}, note = {talk: {I}nternational {C}onference on the {S}imulation of {S}emiconductor {D}evices and {P}rocesses ({S}{I}{S}{D}{E}{P}), {W}ien; 1993-09-07 -- 1993-09-09} }