@inproceedings{TUW-106112, author = {Puchner, Helmut and Selberherr, Siegfried}, title = {{D}ynamic {G}rain-{G}rowth and {S}tatic {C}lustering {E}ffects on {D}opant {D}iffusion in {P}olysilicon}, booktitle = {{P}roceedings {N}{U}{P}{A}{D} {V}, {W}orkshop on {N}umerical {M}odeling of {P}rocesses and {D}evices for {I}ntegrated {C}ircuits}, year = {1994}, pages = {109--112}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1994/CP1994_Puchner_1.pdf}, isbn = {0-7803-1867-6}, note = {talk: {I}nternational {W}orkshop on {N}umerical {M}odeling of {P}rocesses and {D}evices for {I}ntegrated {C}ircuits ({N}{U}{P}{A}{D}), {H}onolulu; 1994-06-05 -- 1994-06-06} }