@phdthesis{TUW-106120, author = {Bauer, Robert}, title = {{N}umerische {B}erechnung von {K}apazit{\"a}ten in dreidimensionalen {V}erdrahtungsstrukturen}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {1994}, url = {http://www.iue.tuwien.ac.at/phd/bauer} }