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@phdthesis{TUW-106122,
    author = {Strasser, Ernst},
    title = {{S}imulation von {T}opographieprozessen in der {H}albleiterfertigung},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1994},
    url = {http://www.iue.tuwien.ac.at/phd/strasser}
}