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@inproceedings{TUW-106135,
    author = {Strasser, Ernst and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {M}odels and {A}lgorithms for {W}afer {T}opography {E}valuation},
    booktitle = {{P}roceedings {M}icroelectronics '94},
    year = {1994},
    pages = {23--24},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1994/CP1994_Strasser_2.pdf},
    note = {invited; talk: {M}icroelectronics {C}onference, {Z}venigorod; 1994-11-28 -- 1994-12-03}
}