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@inproceedings{TUW-106143,
    author = {Bohmayr, Walter and Selberherr, Siegfried},
    title = {{T}rajectory {S}plit {M}ethod for {M}onte {C}arlo {S}imulation of {I}on {I}mplantation {D}emonstrated by {T}hree-{D}imensional {P}oly-{B}uffered {L}{O}{C}{O}{S} {F}ield {O}xide {C}orners},
    booktitle = {{P}roceedings {V}{L}{S}{I} {T}echnology, {S}ystems and {A}pplications {S}ymposium},
    year = {1995},
    pages = {104--107},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1995/CP1995_Bohmayr_1.pdf},
    isbn = {0-7803-2773-x},
    note = {talk: {V}{L}{S}{I} {T}echnology, {S}ystems and {A}pplications {S}ymposium ({V}{L}{S}{I}{T}{S}{A}), {T}aipei; 1995-05-31 -- 1995-06-02}
}