@article{TUW-106150, author = {Puchner, Helmut and Selberherr, Siegfried}, title = {{A}n {A}dvanced {M}odel for {D}opant {D}iffusion in {P}olysilicon}, journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices}, year = {1995}, volume = {42}, number = {10}, pages = {1750--1755}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1995/JB1995_Puchner_1.pdf}, doi = {10.1109/16.464423} }