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@article{TUW-106150,
    author = {Puchner, Helmut and Selberherr, Siegfried},
    title = {{A}n {A}dvanced {M}odel for {D}opant {D}iffusion in {P}olysilicon},
    journal = {{I}{E}{E}{E} {T}ransactions on {E}lectron {D}evices},
    year = {1995},
    volume = {42},
    number = {10},
    pages = {1750--1755},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1995/JB1995_Puchner_1.pdf},
    doi = {10.1109/16.464423}
}