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@article{TUW-106154,
    author = {Khalil, N. and Faricelli, John and Huang, C.-L. and Selberherr, Siegfried},
    title = {{T}wo-{D}imensional {D}opant {P}rofiling of {S}ubmicron {M}{O}{S}{F}{E}{T} {U}sing {N}onlinear {L}east {S}quares {I}nverse {M}odeling},
    journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}},
    year = {1996},
    volume = {14},
    number = {1},
    pages = {224--230},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/JB1996_Khalil_1.pdf},
    doi = {10.1116/1.589033}
}