@article{TUW-106154, author = {Khalil, N. and Faricelli, John and Huang, C.-L. and Selberherr, Siegfried}, title = {{T}wo-{D}imensional {D}opant {P}rofiling of {S}ubmicron {M}{O}{S}{F}{E}{T} {U}sing {N}onlinear {L}east {S}quares {I}nverse {M}odeling}, journal = {{J}ournal of {V}acuum {S}cience {\&} {T}echnology {B}}, year = {1996}, volume = {14}, number = {1}, pages = {224--230}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/JB1996_Khalil_1.pdf}, doi = {10.1116/1.589033} }