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@inproceedings{TUW-106156,
    author = {Leitner, Ernst and Bohmayr, Walter and Fleischmann, Peter and Strasser, Ernst and Selberherr, Siegfried},
    title = {3{D} {T}{C}{A}{D} at {T}{U} {V}ienna},
    booktitle = {{P}roceedings 3-{D}imensional {P}rocess {S}imulation {W}orkshop},
    year = {1995},
    pages = {136--161},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1995_Leitner_2.pdf},
    isbn = {3-211-82741-2},
    doi = {10.1007/978-3-7091-6905-6{\_}7},
    note = {invited; talk: 3-{D}imensional {P}rocess {S}imulation {W}orkshop, {E}rlangen; 1995-09-05}
}