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@inproceedings{TUW-106158,
    author = {Rieger, Gerhard and Halama, Stefan and Selberherr, Siegfried},
    title = {{A} {P}rogrammable {T}ool for {I}nteractive {W}afer-{S}tate {L}evel {D}ata {P}rocessing},
    booktitle = {{P}roceedings {S}{I}{S}{D}{E}{P} 95 {C}onference},
    year = {1995},
    pages = {58--61},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1995_Rieger_1.pdf},
    isbn = {3-211-82736-6},
    doi = {10.1007/978-3-7091-6619-2{\_}13},
    note = {talk: {I}nternational {C}onference on the {S}imulation of {S}emiconductor {D}evices and {P}rocesses ({S}{I}{S}{D}{E}{P}), {E}rlangen; 1995-09-06 -- 1995-09-08}
}