@inproceedings{TUW-106166, author = {Burenkov, A. and Bohmayr, Walter and Lorenz, J. and Ryssel, Heiner and Selberherr, Siegfried}, title = {{A}nalytical {M}odel for {P}hosphorus {L}arge {A}ngle {T}ilted {I}mplantation}, booktitle = {{P}roceedings {S}{I}{S}{D}{E}{P} 95 {C}onference}, year = {1995}, pages = {488--491}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1995_Burenkov_1.pdf}, isbn = {3-211-82736-6}, doi = {10.1007/978-3-7091-6619-2{\_}118}, note = {talk: {I}nternational {C}onference on the {S}imulation of {S}emiconductor {D}evices and {P}rocesses ({S}{I}{S}{D}{E}{P}), {E}rlangen; 1995-09-06 -- 1995-09-08} }