@inproceedings{TUW-106171, author = {Puchner, Helmut and Selberherr, Siegfried}, title = {{S}imulation of {I}on {I}mplantation {U}sing the {F}our-{P}arameter {K}appa {D}istribution {F}unction}, booktitle = {{P}roceedings {S}olid-{S}tate and {I}ntegrated-{C}ircuit {T}echnology {C}onference}, year = {1995}, pages = {295--297}, url = {http://www.iue.tuwien.ac.at/pdf/ib_1995/CP1995_Puchner_1.pdf}, note = {talk: {I}nternational {C}onference on {S}olid {S}tate and {I}ntegrated {C}ircuit {T}echnology ({I}{C}{S}{I}{C}{T}), {P}eking; 1995-09-24 -- 1995-09-28} }