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@inproceedings{TUW-106282,
    author = {Heitzinger, Clemens and Sheikholeslami, Alireza and Puchner, Helmut and Selberherr, Siegfried},
    title = {{P}redictive {S}imulation of {V}oid {F}ormation {D}uring the {D}eposition of {S}ilicon {N}itride and {S}ilicon {D}ioxide {F}ilms},
    booktitle = {203\textsuperscript{rd} {E}{C}{S} {M}eeting},
    year = {2003},
    pages = {356--365},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Heitzinger_1.pdf},
    isbn = {1-56677-347-4},
    note = {talk: {M}eeting of the {E}lectrochemical {S}ociety ({E}{C}{S}), {P}aris; 2003-04-26 -- 2003-05-02}
}