@inproceedings{TUW-106282, author = {Heitzinger, Clemens and Sheikholeslami, Alireza and Puchner, Helmut and Selberherr, Siegfried}, title = {{P}redictive {S}imulation of {V}oid {F}ormation {D}uring the {D}eposition of {S}ilicon {N}itride and {S}ilicon {D}ioxide {F}ilms}, booktitle = {203\textsuperscript{rd} {E}{C}{S} {M}eeting}, year = {2003}, pages = {356--365}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Heitzinger_1.pdf}, isbn = {1-56677-347-4}, note = {talk: {M}eeting of the {E}lectrochemical {S}ociety ({E}{C}{S}), {P}aris; 2003-04-26 -- 2003-05-02} }