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@article{TUW-106288,
    author = {Sheikholeslami, Alireza and Heitzinger, Clemens and Puchner, Helmut and Badrieh, Fuad and Selberherr, Siegfried},
    title = {{S}imulation of {V}oid {F}ormation in {I}nterconnect {L}ines},
    journal = {{P}roceedings of {S}{P}{I}{E}},
    year = {2003},
    volume = {5117},
    pages = {445--452},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2003_Sheikoleslami_1.pdf},
    doi = {10.1117/12.498783}
}